deep trench isolation process
由ZKuiying著作·2010·被引用5次—Adeeptrenchisolationprocessprovidesverylowleakagecurrent,low...Accordingtotheoptimizedtrenchprocess,desirableisolationcapabilityofthedeep ...,ThetrenchisolationregionsisolateeachpairofCMOStransistorsandanylinearorhig...
Deep trench isolated CMOS devices
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由RDRung著作·1982·被引用139次—Adeep(5-6microns)trenchisolationprocesswhichpermitsminimumfeaturesizespacingbetweenn-andp-channeldevicesinbulkCMOSisdescribed.
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